Homoépitaxial diamond films codoped with phosphorus and nitrogen by chemical-vapor deposition

Nitrogen incorporation and trace element analysis of nanocrystalline diamond thin films by secondary ion mass spectrometry

Nitrogen has been successfully incorporated into nanocrystalline diamond films produced by a CH4 /N2 microwave plasma-enhanced chemical vapor deposition method. High mass resolution secondary ion mass spectrometry ~SIMS! characterization shows that the density of the incorporated nitrogen, monitored via CN, can be as high as 10 atoms/cm, depending on the ratio of CH4 to N2 in the reactant gas a...

Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition

Effect of Catalyst on the Growth of Diamond-like Carbon by HFCVD

Diamond like carbon (DLC) film was grown by hot filament chemical vapor deposition (HFCVD)technique. In the present work, we investigated the quality of the DLC films groew on the substratesthat were coated with various metal nanocatalysts (Au and Ni). A combination of CH4/Ar/H2 rendersthe growth of carbon nanostructures technique (diamond like carbon). The utilized samples werecharacterized by...

Nitrogen and Aluminum Doped Diamond-like Carbon Thin Films by Dc Magnetron Sputtering Deposition

Diamond-like carbon (DLC) thin films used in this study were prepared with DC magnetron sputtering deposition. Silicon (100) wafers were used as the substrates onto which an RF bias was applied during the film deposition. For the nitrogen doped DLC films, a pure graphite target was used as the carbon source and nitrogen gas was introduced into the deposition chamber via a mass flow controller. ...

Gas Permeation, Mechanical Behavior and Cytocompatibility of Ultrathin Pure and Doped Diamond-Like Carbon and Silicon Oxide Films

Protective ultra-thin barrier films gather increasing economic interest for controlling permeation and diffusion from the biological surrounding in implanted sensor and electronic devices in future medicine. Thus, the aim of this work was a benchmarking OPEN ACCESS Coatings 2013, 3 269 of the mechanical oxygen permeation barrier, cytocompatibility, and microbiological properties of inorganic ~2...